Microstructure and initial growth characteristics of the low temperature microcrystalline silicon films on silicon nitride surface
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چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2001
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.1378334